Nonlinear Many-Staged Diffusion |
| A.J. Janavičius Šiauliai University, P. Višinskio 25, 5400 Šiauliai, Lithuania |
| Received: November 25, 1997; revised version April 20, 1998 |
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| We considered and solved the nonlinear diffusion equation formerly. The more complicated but more useful task of many-staged diffusion is solved in this paper. The obtained solution satisfies the initial distribution of the impurities and can be generalized for many-staged diffusion. Using these solutions we can take into account all the stages of a planary transistor formation. |
| DOI: 10.12693/APhysPolA.93.731 PACS numbers: 66.30.-h |