The Influence of the Rotational Speed of the Polymer SU8 on the Thickness of the Waveguide Layer
K. Gut, T. Pustelny and D. NabagÅ‚o
Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
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The paper presents results of investigations concerning the measurement of the refractive index and thickness of planar waveguide structures, obtained by the photopolymerization of polymer SU8. Sodium-calcium glass was used as the substrate. As the knowledge of the quoted parameters is from the viewpoint of the structure of various types of optical sensors of crucial importance, the way of their determination has been presented. The paper deals also with the method of constructing planar polymer waveguides, taking into account problems connected with their adhesion to glass substrates.
DOI: 10.12693/APhysPolA.118.1136
PACS numbers: 42.25.Hz, 42.25.-p, 42.70.-a, 42.82.-m, 42.82.Et, 68.35.Ct