Properties of Nanocrystalline TiO2:V Thin Films as a Transparent Semiconducting Oxides |
| K. Sieradzka, J. Domaradzki, E. Prociow, M. Mazur and M. Lapinski
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland |
| Full Text PDF |
| In this work the nanocrystalline TiO2 thin films doped with vanadium in amount of 19 at.% and 23 at.% prepared by magnetron sputtering method have been presented. The transmission measurements shows that V-doped TiO2 thin films were transparent in ca. 81% in the visible range of light spectrum. On the basis of electrical examinations it was found that fabricated TiO2:V thin films are semiconductors at room temperature and have different type of electrical conduction depending on the amount of vanadium dopant applied. |
| DOI: 10.12693/APhysPolA.116.S-33 PACS numbers: 73.61.Ey, 78.66.-w, 71.20.Nr |