Direct Ellipsometry Problem for the Substrate-Based Uniaxial Non-Homogeneous Film
M.M. Karpuka and S.M. Karpukb
aKoszalin Technical University, al. Kwiatkowskiego 6-E, 75-343 Koszalin, Poland
bDepartment of Laser Physics and Spectroscopy, Belarussian State University, Fr. Skaryna ave. 4, 220050 Minsk, Belarus
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Received: February 1, 2001; revised version September 27, 2001
An iterative procedure of calculation of reflectivities and transmission coefficients of light rays for an uniaxial film with a lapse rate of an index of refraction on a uniaxial substrate was gained by orienting the axis of anisotropy along the normal to the boundary. With its help the dependences of ellipsometric angles Δ and ψ for a linear, quadratic, and sine-shaped profiles of refractive indices of a uniaxial immersing film with optic axis oriented along the normal to the boundary were analyzed. The dependences of angles Δ and ψ on quantity of an uptake and anisotropy of the film were also examined. The numerical modelling for ZnO films and Langmuir--Blodgett-like films on a melted quartz was carried out, and this allowed to draw conclusions of practical importance for the ellipsometric investigations of the film structures.
DOI: 10.12693/APhysPolA.100.859
PACS numbers: 78.20.--e, 44.30.+v