@article{app147z4p6,
authors = {A. Bouhadiche, S. Benghorieb, H. Bouridah, M.R. Beghoul, R. Remmouche, H. Haoues},
title = {Predictive Control of Surface Roughness as a Function of Temperature in a SiN$_{x}$ Thin Film Deposition Process Using the Kinetic Monte Carlo Method},
journal = {Acta Phys. Pol. A},
year = {2025},
pages = {333},
volume = {147},
issue = {4},
doi = {10.12693/APhysPolA.147.333},
url = {dx.doi.org/10.12693/APhysPolA.147.333}
}