@article{app148z2p09,
authors = {A. Revenko, V. Kidalov, D. Duleba, M. Derhachov, R. Redko, R.P. Johnson, M.-A. A{\ss}mann, O. Gudymenko, O. Sushko, M. Koptiev},
title = {Experimental Analysis and Computational Modeling of Residual Stress in $\beta $-Ga$_2$O$_3$ Thin Films Grown on Si by RF Magnetron Sputtering},
journal = {Acta Phys. Pol. A},
year = {2025},
pages = {158},
volume = {148},
issue = {2},
doi = {10.12693/APhysPolA.148.158},
url = {dx.doi.org/10.12693/APhysPolA.148.158}
}