Nanostructuring and Hardness Investigations of Thin Films by Scanning Force Microscopy
M. Nowickia, A. Richterb, R. Riesb and M. Oszwałdowskia
aInstitute of Technical Physics, Poznań University of Technology, Piotrowo 3, 60-965 Poznań, Poland
bDepartment of Physics and Technology, Technische Fachhochschule Wildau Bahnhofstr. 1, 15745 Wildau, Germany
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The scanning force microscope was used to scratch thin films and to write nanoscale pattern on surfaces as well as to perform nanoindentation for hardness measurements. Different thin film materials such as C60 films, diamond-like carbon, metals and semiconducting films have been investigated.
DOI: 10.12693/APhysPolA.93.437
PACS numbers: 61.16.Ch, 68.35.-p