Growth of NdBa2Cu3O7-δ Superconducting Thin Films on SrTiO3(100) and LaSrGaO4(100) Substrates |
| J.-C. Park, D.H. Ha, I.-S. Kim and Y.K. Park Korea Research Institute of Standards and Science, P.O. Box 102, Yusong, Taejon 305-600, Republic of Korea |
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| NdBa2Cu3O7-δ superconducting thin films were grown on SrTiO3(100) and LaSrGaO4(100) substrates by off-axis rf sputtering and pulsed laser deposition. The effects of several deposition parameters, e.g. gas pressure, substrate temperature and energy density were studied. Thin films grown by off-axis rf sputtering were highly c-axis oriented, but those by pulsed laser deposition were predominantly a-axis oriented under our deposition conditions. However, the c-axis oriented portion for the films grown by pulsed laser deposition was increased by increasing the temperature above 800°C. Tc(zero) was 87 K and 83 K for the c- and a-axis oriented films respectively. The critical current density of c-axis oriented films was 106-107 A/cm2 below 60 K. |
| DOI: 10.12693/APhysPolA.92.105 PACS numbers: 74.76.Bz |