Growth, Morphology and Superconductivity of Epitaxial (RE)1Ba2Cu3O7-δ Films on SrTiO3 and NdGaO3 Substrates |
| J.-P. Krumme, B. David, V. Doormann, R. Eckart, G. Rabe and O. Dössel Philips GmbH, Forschungslaboratorien, Abteilung Technische Systeme Hamburg, Röntgenstraße 24-26, 22335 Hamburg, Germany |
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| The growth of (RE)1 Ba2Cu3O7-δ (RE: Y, Nd) films on NdGaO3 and SrTiO3 substrates by ion-beam and dc-/rf-magnetron sputter deposition is discussed in the framework of growth kinetics, oxygen exchange, epitaxial relations, substrate crystal orientation, in-plane coherence, vicinal substrate cuts, overgrowth on steps, superconductor/insulator combinations, and patterning by ion-beam etching. The process conditions for ion-beam and magnetron sputter deposition are briefly outlined. |
| DOI: 10.12693/APhysPolA.92.55 PACS numbers: 74.76.-w, 81.15.-z, 68.65.+g |