Preparation of Very Large YBCO Films on Single- and Polycrystalline Substrates |
| H. Kinder, W. Prusseit, R. Semerad and B. Utz Technical University of München, Physics Department E 10, 85747 Garching, Germany |
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| High quality YBa2Cu3O7 thin films on areas of up to 9" in diameter have been grown by reactive thermal co-evaporation using a rotating substrate holder. A scanning inductive jc probe is used to monitor the homogeneity of critical current densities which are typically greater than 2 MA/cm2. The same technique also allows a double sided deposition for filter applications. Surface resistance values are found to be below 500 μΩ at 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jc values of 1.4 MA/cm2 are achieved at 77 K as well. We have also studied the properties of Nd1-xBa2+xCu3O7 films grown with the same system. |
| DOI: 10.12693/APhysPolA.92.47 PACS numbers: 81.15.Cd, 74.72.-h, 68.55.-a |