Fluorination Under NF3 Flow of Oxygen Deficient YBa2Cu3Ox Thin Films Deposited on Various Types of Substrate |
| P. Massiot, C. Perrin and M. Guilloux-Viry, A. Perrin and M. Sergent Laboratoire de Chimie du Solide et Inorganique Moléculaire, URA CNRS 1495 Avenue du Général Leclerc, 35042 Rennes Cédex, France |
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| Oxygen deficient YBaCuO thin films, c-epitaxially grown by laser ablation on different substrates such as (100)MgO, (100)SrTiO3 and (100)LaAlO3, were fluorinated by an ex situ solid/gas reaction with NF3 (3% NF3 diluted in N2) at 280°C. The kinetics of the reaction depends on the type of the substrate. After reaction the superconducting behaviour of the films is improved without degradation of their crystallinity, whatever the nature of the substrate. The stability of the fluorinated films under oxygen or nitrogen gas was studied. All these results will be compared with those previously obtained for fluorination of oxygen deficient YBaCuO ceramics. |
| DOI: 10.12693/APhysPolA.92.221 PACS numbers: 74.76.Bz, 68.55.Ln |