Influence of Substrate Temperature on Magnetic and Structural Properties of RF Magnetron Sputtered Co-Cr Thin Films |
| Jong-Sung Baek, Yark-Yeon Kim, Woo-Young Lim Dept. of Phys., Korea Univ., Chochiwon 339-700, South Korea Yurng-Dae Kim Dept. of Sci. Edu., Chungbuk Nat'l Univ., Cheongju 360-763, South Korea and Seong-Cho Yu Dept. of Phys., Chungbuk Nat'l Univ., Cheongju 360-763, South Korea |
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| The present paper describes the substrate temperature Ts dependence on magnetic and structural properties of Co-21 at.% Cr thin films deposited on the Corning glass substrate by RF magnetron sputtering. The properties of the samples, such as saturation magnetization Ms, in-plane squareness ratio S∥, effective magnetic anisotropy field H'k, spectroscopic splitting factor g, and hcp (002) peak intensity I002, were examined by vibrating sample magnetometer, Q-band (≈ 33.9 GHz) ferromagnetic resonance measurements and X-ray diffractometry. Specially, the presence of the various ferromagnetic constituents in Co-Cr thin films are examined by the ferromagnetic resonance studies. With increasing Ts from room temperature to 200°C, S∥ increases from 0.08 to 0.56 but H'k decreases from 2530 Oe to -3900 Oe. Also I002 decreases with increasing Ts. It is summarized that the perpendicular magnetic anisotropy and c-axis orientation of Co-Cr films are improved at lower substrate temperature. |
| DOI: 10.12693/APhysPolA.91.307 PACS numbers: 75.50.Ss |