Materials Technology for GaSb-Based optoelectronic Devices
A. Piotrowska, E. Kamińska, T.T. Piotrowski, M. Piskorski, M. Guziewicz, E. Papis, K. Gołaszewska-Malec and S. Kasjuniuk
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
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A study is made of surface preparation, metallization, patterning and dielectric deposition with the aim of developing process technology for GaSb-based photonic devices.
DOI: 10.12693/APhysPolA.90.903
PACS numbers: 73.40.Ns, 81.05.Ea, 81.40.-z