High Resolution X-ray Reciprocal Space Mapping |
| G. Bauer, J.H. Li Institut für Halbleiterphysik, Johannes Kepler Universität, Linz, 4040 Austria and V. Holy Faculty of Science, Masaryk University, 61137 Brno, Czech Republic |
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| A survey will be given on recent advances in the investigation of semiconductor epilayers, heterostructures and superlattices using reciprocal space mapping techniques based on triple-axis diffractometry. It is shown that X-ray reciprocal space mapping yields quantitative information on strain, strain relaxation, as well as composition in such structures. These data are obtained from analyses of the isointensity contours of scattered X-ray intensity around reciprocal lattice points. Further analysis of the diffuse scattering yields also information on defect distribution in the epilayers. |
| DOI: 10.12693/APhysPolA.89.115 PACS numbers: 61.10.-i, 68.55.-a, 61.72.Lk |