ACTA

Electrical and Structural Properties of Ohmic Contacts to n-Type and High Resistivity CdTe

E. Kamińska^a, A. Piotrowska^a, M. Guziewicz^a, S. Gierlotka^b, E. Papis^a, J. Łusakowski^e, K. Szadkowski^e, S. Kwiatkowski^d, T. Dietl^e, G. Grabecki^e, J. Jaroszyński^e, G. Karczewski^e and A.K. Zakrzewski^e
^aInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
^bUnipress, Polish Academy of Sciences, Sokołowska 29/37, 01-142 Warszawa, Poland
^cInstitute of Experimental Physics, Warsaw University, Hoża 69, 00-681 Warszawa, Poland
^dA. Soltan Institute for Nuclear Studies, Hoża 69, 00-681 Warszawa, Poland
^eInstitute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warszawa, Poland

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The interaction between CdTe and In during the formation of an ohmic contact has been investigated. Emphasis is placed on the study of the effect of thermally induced sublimation of cadmium on electrical properties of contacts. Presented results prove the effectiveness of cap annealing and rapid thermal processing in fabrication of improved ohmic contacts with limited Cd losses during the contacting procedure.

DOI: 10.12693/APhysPolA.87.411
PACS numbers: 73.40.Ns