SEM Characterization of Multilayer Structures |
| V.V. Aristov, N.N. Dryomova, V.A. Kireev, I.I. Razgonov and E.B. Yakimov Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432, Chernogolovka, Moscow district, Russia |
| Dedicated to Professor Dr. Julian Auleytner on the occasion of his 70th birthday |
| Received: July 23, 1992 |
| Full Text PDF |
| The possibilities of non-destructive multilayer structure characterization using the backscattering electron and modulated cathodoluminescence modes of the SEM have been discussed. It is shown that these techniques allow one to measure the parameters of thin layers of the thickness of about 10 nm. |
| DOI: 10.12693/APhysPolA.83.81 PACS numbers: 79.20.Fv, 68.35.Dv |