Examples for the Industrial Use of Synchrotron Radiation
J. Hormes, R. Chauvistré, W. Schmitt and M. Pantelouris
Physikalisches Institut der Universität Bonn, Nussallee 12, D-5300 Bonn 1, Germany
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Synchrotron radiation has become a valuable tool for many fields of basic research. Several of the methods which were here developed are also suitable for solving industrial problems. Perhaps the most promising ones are the various X-ray techniques, e.g. X-ray absorption spectroscopy (EXAFS and XANES) and X-ray fluorescence. In the following article the theoretical and experimental basis for these techniques is shortly introduced and some instructive examples for such applications for actual industrial problems are dicussed. In the last section, X-ray lithography for the production of microstructures is presented as an example where synchrotron radiation is already today used for industrial production.
DOI: 10.12693/APhysPolA.82.37
PACS numbers: 07.85.+n, 29.20.-c, 32.30.Rj, 78.70.Dm