Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization Acta Physica Polonica A 140, 215 (2021), ERRATUM |
| V. Kanclíř, J. Václavík, K. Žídek
Regional Centre for Special Optics and Optoelectronic Systems (TOPTEC), Institute of Plasma Physics, Academy of Sciences of the Czech Republic, Za Slovankou 1782/3, 182 00 Prague 8, Czech Republic |
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DOI:10.12693/APhysPolA.147.498 topics: |