Effect of Pressure on Argon Dielectric Barrier Discharge |
| A. Bouchikhi
University of Saïda, Faculty of Technology, Department of Electrical Engineering, Saïda 20000, Algeria |
| Full Text PDF |
| In this work, we study the argon dielectric barrier discharge with metastable atom density on a capacitive coupled radio frequency at a pressure of 1-6 Torr. The transport parameter of argon depends on the mean electron energy, and its range is about 0.04-42 eV. The one-dimensional fluid model and the drift-diffusion theory were utilised to describe the argon dielectric barrier discharge. The effect of pressure on the properties of argon dielectric barrier discharge is presented on the cycle-averaged diet, especially on particle density, electric potential, and metastable atom density. Consequently, the values of these quantities increase with increasing pressure. In addition, the surface charge concentration and the gap voltage also increase. |
DOI:10.12693/APhysPolA.142.249 topics: argon RF discharge, dielectric barrier, moments of Boltzmann's equation, Poisson's equation |