ACTA

Synthesis of Ag-TiO₂ Thin Film - Molarity and Temperature Effect on Microstructure

D.S.C. Halin^a, K.A. Razak^a, A. Azani^a, M.M.A.B. Abdullah^a, M.A.A.M. Salleh^a, N. Mahmed^a, M.M. Ramli^{a, b}, A.W. Azhari^c, V. Chobpattana^d, Ł. Kaczmarek^e
^aCenter of Excellence Geopolymer & Green Technology (CEGeoGTech), School of Materials Engineering, Universiti Malaysia Perlis, (UniMAP), 02600, Jalan Kangar-Arau, Perlis, Malaysia
^bSchool of Microelectronic Engineering, Universiti Malaysia Perlis, Pauh Putra Campus, 02600, Perlis, Malaysia
^cWater Research Group (WAREG), School of Environmental Engineering, Universiti Malaysia Perlis, 02600, Perlis, Malaysia
^dDepartment of Materials and Metallurgical Engineering, Faculty of Engineering, Rajamangala University of Technology Thanyaburi (RMUTT), Thailand
^eInstitute of Materials Science and Engineering, Lodz University of Technology, B. Stefanowskiego 1/15, 90-924 Lodz, Poland

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Ag-TiO₂ thin films with different concentration of silver (Ag) added were successfully deposited onto Si-substrate via sol-gel spin coating method. The phase analysis and microstructures of Ag-TiO₂ thin films have been characterized by X-ray diffractometer and scanning electron microscope. X-ray diffraction spectra show existing different phases influenced by the concentration of the Ag and the annealing temperature. The micrograph of scanning electron microscopy revealed the thin films annealed at 600° with 7 mol% of Ag concentration which shows that the Ag particles were found like a white dot formed on the grain of TiO₂ thin films.

DOI:10.12693/APhysPolA.138.159
topics: Ag/TiO₂ thin film, sol-gel, spin coating, annealing temperature, Ag concentration