The TCVD Growth of CNTs over Copper-Silver-Palladium Nanoparticles Prepared by DC Magnetron Sputtering
S. Rezaeea, M. Mardanib, R. Shakouryc
aDepartment of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
bVacuum Technology Research Group, ACECR, Sharif University Branch, Tehran, Iran
cDepartment of Physics, Faculty of Science, Imam Khomeini International University, Qazvin, Iran
Received: October 17, 2019; revised version December 25, 2019; in final form January 28, 2020
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In this study, we investigate the use of catalytic copper-silver-palladium substrates for the growth of multiwalled carbon nanotubes via the thermal chemical vapor deposition. These layers are comprised of nanocrystals of Cu2O, CuO, Ag, Pd, Cu, and PdO and were grown using a DC magnetron sputtering method. Scanning electron microscopy characterizations confirmed the significant growth of carbon nanotubes on the catalytic layer. A comparison of the growth of nanotubes indicated that the thickness of the catalytic layers has a significant impact on the quality and the diameter of the carbon nanotubes. Two major peaks were seen in the Raman spectrum. The formation of graphite multiwalled nanotubes and the presence of defects in the graphene-like hexagonal disordered carbons were confirmed by the appearance of the G band (graphite band) and the D band (disorder-induced band), respectively. The ratio of the intensities of these bands, I(G)/I(D), indicated a good graphite structural quality.

DOI:10.12693/APhysPolA.137.1075
topics: DC magnetron sputtering, TCVD, carbon nanotubes, nanocatalyst\\vs*{12pt}