ACTA

Application of Synchrotron Radiation Based X-ray Reflectometry in Analysis of TiO₂ Nanolayers, Unmodified and Irradiated with Xe^q+ Ions

R. Stachura^a, A. Kubala-Kukuś^{a, b}, D. Banaś^{a, b}, I. Stabrawa^{a, b}, K. Szary^{a, b}, P. Jagodziński^a, G. Aquilanti^c, I. Božičević Mihalić^d, M. Pajek^a, J. Semaniak^a, M. Teodorczyk^e
^aInstitute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland
^bHolycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland
^cElettra - Sincrotrone Trieste, s.s. 14, km 163.5 in Area Science Park, 34149 Basovizza, Trieste, Italy
^dRudjer Boskovic Institute, Bijenicka cesta 54, 10000 Zagreb, Croatia
^eInstitute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warszawa, Poland

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In this work synchrotron radiation based X-ray reflectometry method was applied for determination of morphology of TiO₂ nanolayers, unmodified, and irradiated with low energy highly charged Xe^q+ ions. Using the synchrotron radiation based X-ray reflectometry technique density, thickness, and roughness of the TiO₂ nanolayers were determined. The results showed that the thicknesses of the nanolayers obtained with synchrotron radiation based X-ray reflectometry method agree within the experimental uncertainty with the declared thicknesses. Moreover, the density of the nanolayers is much lower than density of the bulk TiO₂ due to their nanometer thickness. The results obtained for irradiated samples suggest possible amorphization and smoothening of the TiO₂ nanolayers surface due to interactions of the highly charged ions.

DOI:10.12693/APhysPolA.137.38
topics: titanium dioxide, nanolayers, highly charged Xe ions\\vs*{8pt}