Characterization of Thin Film Boron Nitride Coatings and Observation of Graphite-Like Boron Nitride

G. Durkayaa, İ. Efeoğlub, K. Ersoyc, B. Çetinc, H. Kurtuldud aAtilim University, Department of Metallurgical and Materials Engineering, Ankara, Turkey bAtatürk University, Dept. of Mechanical Engineering, Erzurum, Turkey cFNSS Defense Systems Co. Inc., Engineering and Research Department, Ankara, Turkey dBaskent University, Department of Biomedical Engineering, Ankara, Turkey

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Cubic boron nitride is a coating solution to improve wear performances in demanding engineering applications. In order to achieve the best performance from this thin film system, the physical dynamics behind the phase compositions, phonon dynamics, surface quality, interfacial effects and stoichiometric relations should be understood. In this study, for this purpose, physical vapor deposition grown BN thin films were studied in detail using the Raman spectroscopy, atomic force microscopy, and scanning electron microscopy techniques.

DOI:10.12693/APhysPolA.135.743 topics: boron nitride, cubic, Raman, AFM, SEM