Angular Distribution of Sputtered Particles from Ternary Alloy Fe71.9Cr5.6Al22.5 under Kr+ Bombardment at Normal Incidence

A. Afkira, M. Ait El Fqiha, b, A. El Boujlaidia, L. Jadouala, R. Jourdania, H. Aouchichec, A. Kaddouria aEquipe Spectroscopie & Imagerie Atomiques des Matériaux, Université Cadi Ayyad, Marrakech, Maroc bLaboratoire d'Ingénierie des Structures, Systèmes Intelligents et Energie Electrique, ENSAM; Université Hassan II, Casablanca, Maroc cLaboratoire de Mécanique, Structures et Énergétique, Université Mouloud Mammeri de Tizi-Ouzou, BP 17, Tizi-Ouzou, Algeria

Received: July 17, 2018; in final form December 18, 2018

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Iron, chromium and aluminum particles sputtered under 5 keV by Kr+ ion bombardment at normal incidence from the ternary alloy Fe82Cr6Al12 was simulated. The Stopping and Range of Ions in Matter (SRIM) software combined to a new code-program, called Angulaire, were used to obtain the sputtering yields and angular distributions of the ejected species. The simulation was performed for a large number of incident ions (about 2×105 ions) and the number of particles emitted in the solid angle corresponding to the probe was counted by a computer. The angular distributions of sputtered particles were compared with the results available in the literature and showed a reasonable agreement. Furthermore, we have demonstrated that the angular distribution of the differential sputtering yields of all ejected species (iron, aluminum, and chromium) from the ternary alloy exhibited an over-cosine tendency.

DOI:10.12693/APhysPolA.135.434 topics: sputtering yield, angular distribution, Fe82Cr6Al12 ternary alloy\\vs*{+4pt}