Rate Coefficients of Ar+ Ions in Ar/CF4 Mixtures |
| Ž. Nikitović, V. Stojanović, Z. Raspopović
Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia |
| Received: January 22, 2018; in final form October 5, 2018 |
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| In this paper we present a cross-section set for Ar+ in Ar/ CF4 mixtures where existing experimentally obtained data are selected and extrapolated. The Monte Carlo simulation method is applied to accurately calculate transport coefficients in hydrodynamic regime. We discuss new data for Ar+ ions in Ar/CF4 mixtures where mean energy, flux and bulk velocity and rate coefficients are given as a function of E/N (E - electric field, N - gas density). |
DOI:10.12693/APhysPolA.134.1134 PACS numbers: 51.10.+y, 52.20.Hv, 52.65.Pp |