Optical Diffraction Strain Sensor Prepared by Interference Lithography
Y. Zabilaa, P. Horeglada,b, M. Krupiński a, A. Zarzycki a, M. Perzanowski a, A. Maximenko a and M. Marszałek a
aThe Henryk Niewodniczanski Institute of Nuclear Physics, Polish Academy of Sciences, Krakow, Poland
bFaculty of Physics, Astronomy and Appl. Computer Science, Jagiellonian University, Krakow, Poland
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An optical strain sensor was developed for use in stretchable electronics. It consists of a diffraction grating formed directly on the examined surface illuminated by a laser beam which creates interference pattern. This pattern can then be used to determine axial and lateral strains for a uniaxial stress states. Direct laser interference patterning was employed as a fast processing tool for the preparation of micro- and sub-microgratings. Two coherent beams of Nd:YAG laser with 532 nm wavelength and pulse duration of 10 ns were used to selectively remove material from the irradiated sample surface. This technique creates periodic pattern on the metallized surface of polymeric substrates. New sensors formed by direct laser interference patterning method were able to resolve higher order diffraction maxima, which would be of benefit for strain measurement application. Experimental setup for tensile tests was composed of laser probe, the sensor element, and CCD camera. To extract strain values, we analysed acquired interference pattern images in real time software, developed with LabVIEW environment. This kind of contactless strain sensor is suitable for examination of stretchable electronics component for which conventional tensile tests are either not acceptable or can interfere with its normal operation.

DOI: 10.12693/APhysPolA.133.280
topics: Strain, direct laser interference patterning, optical strain sensor, diffraction grating, Poisson ratio, Kapton, flexible, optical strain gauge