Effect of Structure on Physicomechanical Properties of Transition Metals Diboride Films
A.A. Goncharova, A.N. Yunda a, H. Komsta b and P. Rogalski b
aSumy State University, Rimsky-Korsakov 2, 40007 Sumy, Ukraine
bLublin University of Technology, Nadbystrzycka 36-38A, 20-618 Lublin, Poland
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Research of the effect of structure on composition and physicomechanical properties of transition metals diboride films deposited by RF-magnetron sputtering was carried out. It was shown that there is a wide range of different structures, from amorphous to nanocrystalline one with 1-40 nm nanocrystallite sizes in the case of transition metals diboride films. The correlation between the structure, composition, and physicomechanical properties of transition metals diboride films was established.

DOI: 10.12693/APhysPolA.132.270
topics: transition metal diborides, nanocomposite coating, magnetron sputtering, structural state, hardness, elastic modulus