Study of Magnetic Micro-Ellipses by Cantilever Sensor
K. Sečianska, J. Šoltýs and V. Cambel
Institute of Electrical Engineering, SAS, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
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In this paper, we propose a method for prototyping cantilever sensors by means of a modification of commercial atomic force microscopy cantilevers, using electron beam lithography and focused ion beam milling. To overcome obstacles with resist coating related to spin-coating of nonplanar 3D substrates, in this case of free-standing cantilevers, we propose a modified method based on spin-coating technique. An auxiliary atomic force microscopy chip was inserted below the cantilever to quasi-planarize the surface during spin-coating of electron beam resist. Magnetic micro-ellipses were prepared at the free-end of the cantilever by electron beam lithography. We propose a design of a cantilever sensor for the study of magnetic coupling between two cantilevers, prepared by focused ion beam milling. In ideal case, the coupling could be detected by a shift in resonance peaks. Attractive and repulsive forces between magnetic structures were shown by magnetic force microscopy.

DOI: 10.12693/APhysPolA.131.833
PACS numbers: 85.70.Ay, 85.85.+j, 81.16.Nd