A Study on Discharge Characteristics by Using MF and RF Power in Remote Dielectric Barrier Discharge
D.J. Kima,b, Y.K. Shima, H.J. Kimc and J.G. Hanb
aGeniatech Inc., Room 810, Hanlla Sigma Valley, 545 Dunchun-daero, Jungwon-gu, Seongnam-si, Gyeonggi-do, South Korea
bCAPST, Sungkyunkwan University, 300 ChunChun-dong, Jangan-gu, Suwon 440-746, South Korea
cKIST, Center for Spintronics, Hwarangno 14-gil 5, Seongbuk gu, Seoul 136-791, South Korea
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We have developed an atmospheric pressure plasma apparatus of remote dielectric barrier discharge (RDBD) applicable for a large area. We have systematically studied the characteristics of medium frequency (MF, 40 kHz) and radio frequency (RF, 13.56 MHz) discharge using an optical emission spectroscope. Nitrogen (N2) and argon (Ar) gases were used in the MF and RF discharge excitation, respectively, in a mixture with clean dry air (CDA). The peak of oxygen radical (O*2) appears at 259.3 nm when the RDBD is employed. Furthermore, intensive peaks are observed at gas ratios of N2:CDA=100:1 in MF excitation and at gas ratios of Ar:CDA=70:0.5 in RF discharge excitation. On the other hand, the contact angle shows about 5° in PET samples after the RDBD treatment using the RF and MF discharge excitation. Surface analyses of polyethylene terephthalate (PET) samples were carried out using an atomic force microscope and X-ray photoelectron spectroscope.

DOI: 10.12693/APhysPolA.129.707
PACS numbers: 52.77.Bn