Synthesis of PbTiO3 Thin Films by Annealing Multilayer Oxide Structures in Vacuum
A. Iljinasa, V. Stankus a and R. Kaliasas b
aDepartament of Physics, Kaunas University of Technology, Studentų 50, LT-51368, Kaunas, Lithuania
bDepartment of Technology, Kaunas University of Technology, Nemuno 33, LT-37164 Panevėržys, Lithuania
Received: January 25, 2015; In final form: September 30, 2015
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This article presents investigation of syntheses of perovskite PbTiO3 thin films by using reactive magnetron layer-by-layer deposition on Si (100) substrate and post-annealing in air and vacuum (p=5×10-3 Pa). The film stoichiometry was accurately controlled by the deposition of individual layers with the required ( ≈1 nm) thickness, using the substrate periodic moving over targets. Deposited thin films were annealed in air and in vacuum at 670°C and 770°C for 1 h, respectively. The morphological, structural, and chemical properties of thin films deposited at 300°C substrate temperature and post-annealed thin films using either conventional annealing and thermal annealing in vacuum at different temperatures were investigated and compared between. X-ray diffraction measurements of thin films annealed in air show formed crystalline perovskite PbTiO3 phase with tetragonality c/a=1.047. The crystallite size of oxidized films depends on the substrate temperature. The structure of post annealed in vacuum thin films strongly depends on Pb/Ti atomic ratio. It was observed that the best structure and morphology forms when atomic ratio of Pb/Ti was 0.80. Pseudocubic phase of lead titanate forms with sufficiently low tetragonality at 670°C temperature.

DOI: 10.12693/APhysPolA.129.121
PACS numbers: 81.15.Cd, 68.55.-a