Investigation of Nanoscale TiN/MoN Multilayered Systems, Fabricated Using Arc Evaporation

A.D. Pogrebnjaka, O.V. Bondar a, G. Abadias b, D. Eyidi b, V.M. Beresnev c, O.V. Sobol d, B.O. Postolnyi a and P. Zukowski e aSumy State University, 40007 Sumy, Ukraine bP' Institute, University of Poitiers, Poitiers, Futuroscope, France cKharkiv National University, Kharkiv, Ukraine dNational Technical University "KhPI", Kharkiv, Ukraine eLublin University of Technology, Lublin, Poland

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Using the vacuum-arc evaporation method we fabricated periodic multilayered TiN/MoN structures with different bilayer periods λ ranging from 8 to 100 nm. We found that molybdenum nitride and titanium nitride layers grown on steel show local partial epitaxy and columnar growth across interfaces. A molybdenum-titanium carbide interlayer was evidenced between the substrate and the multilayer. Molybdenum nitride and titanium nitride layers contain small (5÷30 nm) grains and are well crystallized with (100) preferred orientation. They were identified as stoichiometric fcc TiN and cubic γ-M2N. Non-cubic molybdenum nitride phases were also detected. The hardness of the obtained structures achieved great values and maximal hardness was 31÷41.8 GPa for the multilayered structure with a 8 nm period. Hardness of the obtained coatings is 25÷45% higher in comparison with the initial single-layer nitride coatings, plasticity index of multilayered structure is 0.075.

DOI: 10.12693/APhysPolA.128.836 PACS numbers: 61.46.-w, 62.20.Qp, 62.25.-g