Microstructure and Magnetic Properties of Magnetron-Sputtered [Fe/Pt]n Multilayer Films
Y.M. Zhang a,b, W.X. Yu b, F.H. Chen a, M. Liu a and H.B. Li a,c
aKey Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, PR China
bSchool of Materials Science and Engineering, Jilin University, Changchun 130025, PR China
cState Key Laboratory of Inorganic Synthesis and Preparative Chemistry, Jilin University, Changchun 130012, PR China
Received: September 9, 2014; In final form: June 17, 2015
Full Text PDF
[Fe/Pt]n multilayer films were prepared on thermally oxidized Si (100) substrates at 300°C using dc magnetron sputtering and annealed for different temperature ranging from 350 to 500°C. It is found that the as-deposited [Fe/Pt]n multilayer films exhibit well-resolved periodic structures and low roughness of interface. The ordering degree of the annealed films decreases and their perpendicular magnetic anisotropy deteriorates with increasing the period number. Fe/Pt bilayer film annealed at 350°C shows (001) orientation and hard magnetic characteristic, the coercivity and perpendicular anisotropy enhance with increase of annealing temperature. In addition, the hard and soft magnetic phases are not fully magnetically coupled in the Fe/Pt film annealed at higher temperature.

DOI: 10.12693/APhysPolA.128.326
PACS numbers: 68.55.Jk, 75.50.Ss