X-Rays Response of Diamond Detectors Constructed Using Diamond Layers Produced by Low Power Microwave Chemical Vapor Deposition Reactor

A.J. Kordyasza, A. Bednareka, M. Kowalczyka,b, J. Tarasiukb, E. Kulczyckac, M. Teodorczykd, M. Gajewskid, Ł. Kordyasze, O. Rowińskif, K. Lamparskif, Ł. Karwańskif, T. Lipczewskif aHeavy Ion Laboratory, Warsaw University, L. Pasteura 5a, 02-093 Warsaw, Poland bInstitute of Experimental Physics, University of Warsaw, L. Pasteura 5a, 02-093 Warsaw, Poland cNational Centre for Nuclear Research, A. Sołtana 7, 05-400 Otwock, Poland dInstitute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland eWarsaw University of Technology, Faculty of Mechatronics, Institute of Micromechanics and Photonics, Department of Design of Precision Devices, Warsaw, Poland fMedical University of Warsaw, S. Banacha 1, 02-097 Warsaw, Poland

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The low power reactor for microwave chemical vapor deposition process is described. The rotating Mo holder of 12 mm diameter and 6 mm height with the diamond substrate was heated by 2.45 GHz microwaves to temperature about 800°C in the range of (1.5-7)% CH4/H2 mixture to create plasma at pressure 70 Tr. Stabilization of the holder temperature was performed by optical observation of radiation from the holder followed by adjusting of the magnetron power. Diamond detectors are produced using microwave chemical vapor deposition process grown on single crystal diamond high pressure high temperature Sumimoto substrates, [100] oriented. The response of diamond detectors for X-rays has been measured in the current mode using medical X-rays tube. The linear response of the diamond detector current versus X-ray tube current (dose) is presented.

DOI: 10.12693/APhysPolA.127.1555 PACS numbers: 52.75.-d, 81.15.Gh, 29.40.Vj, 07.85.Fv