Surface Property of Indium Tin Oxide (ITO) After Various Methods of Cleaning |
| K. Kim, K. Ihm, B. Kim
Pohang Accelerator Laboratory, Pohang University of Science, and Technology, San 31, Hyojadong, Pohang. Korea |
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| We investigated the surface property change of indium tin oxide (ITO) with the various cleaning methods, using photoemission spectroscopy (PES), work function change and near-edge X-ray adsorption fine structure (NEXAFS). The detergent treatments of ITO with acetone (C3H6O), methanol (CH4O), 2-propanol (C3H8O), and deionized (D) water yielded work function shifts as high as 0.99 eV compared to the no-treatment ITO. In contrast, work function shifts of 0.10-0.35 eV were measured after other treatments. The lowest C 1s concentration was obtained after O2 plasma treatment of ITO. There was no big change in the peak position and the shape of In 3d5/2, and Sn 3d5/2 after each treatment. But C 1s and O 1s spectra shows a peak shift and shape change. Presence of carbon can be minimized by NaOH treatment combined with oxygen plasma. In NEXAFS spectra of C K-edge on each sample, we found two π-binding states whose positions are 284.5 and 287.9 eV, C=C and C=O, respectively. |
DOI: 10.12693/APhysPolA.127.1176 PACS numbers: 73.20.-r Electron states at surfaces and interfaces |