Nanostructured ATO Anodes Produced by RF Magnetron Sputtering for Li-Ion Batteries
O. Cevher, U. Tocoglu, H. Akbulut
Sakarya University, Engineering Faculty, Department of Metallurgical and Materials Engineering, Esentepe Campus 54187, Turkey
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In this study, the reversible capacities, as well as the cycling behavior, of crystalline antimony-doped tin oxide (ATO) films have been investigated. ATO films were deposited on Cr-coated stainless steel substrates by the RF magnetron sputtering technique, with antimony-doped tin oxide (SnO2:Sb) target in a mixed oxygen/argon gas environment. The ATO films were deposited for 1.0 h in a mixture of Ar and O2 environment with O2/Ar ratio of 10/90, at sputtering power of 75 W, 100 W and 125 W RF. ATO films were examined by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM). The electrochemical properties of ATO anodes were studied using 2016-type coin cells assembled in an argon-filled glove box.

DOI: 10.12693/APhysPolA.127.1065
PACS numbers: 61.72.uj, 81.15.Cd, 82.47.Aa