Porous Silicon Based Sensor for Organic Vapors
E. Kayahana,b,c, Z.B. Bahsid, A.Y. Orale, M. Sezere
aKocaeli University, Electro-Optics Systems Eng., Umuttepe, 41380, Kocaeli, Turkey
bKocaeli University, LATARUM Laboratory, 41275, Yenikoy, Kocaeli, Turkey
cKocaeli University, Hereke MYO, 41800, Hereke-Kocaeli, Turkey
dDept. of Environmental Engineering, Gebze Technical University, 41400, Kocaeli, Turkey
eDept. of Materials Science and Engineering, Gebze Technical University, 41400, Kocaeli, Turkey
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Porous silicon (PS) has been an attractive material for enhancing optical properties of silicon. Its large surface area for sensor applications and compatibility with silicon-based technologies has been a driving force for further technology development. In this study, ability of PS to sense at room temperature organic vapors such as acetone, trichloroethylene and hexane, which are harmful to human health, has been investigated. Electrical (DC) and photo-luminescence (PL) measurements in a controlled atmosphere (nitrogen gas and an organic vapor mix) were performed to test the sensor response towards the organic vapors. It was found that PS surface is very sensitive against these vapors. The experimental results also suggested that PS can be used as a new electro-optical material to sense harmful vapors.

DOI: 10.12693/APhysPolA.127.1400
PACS numbers: 07.07.Df