Porous Silicon Based Humidity Sensor
E. Kayahan
Kocaeli University, Electro-Optics Systems Eng. Umuttepe, 41380, Kocaeli, Turkey, Kocaeli University, LATARUM Laboratory, 41275, Yenikoy, Kocaeli, Turkey, Kocaeli University, Hereke MYO, 41800, Hereke-Kocaeli, Turkey
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Porous silicon (PS) is well known as a photovoltaic material. However, in the last couple of years, research has focused on the use of porous silicon as chemical-biological sensors. This paper discusses the use of PS as an optical humidity sensor. Photo-luminescence (PL) quenching measurements in a controlled humidity atmosphere (mixed Nitrogen gas and water vapor) were performed to test the sensor response towards the water vapor. Surface morphologies of the PS samples were characterized by a scanning electron microscopy (SEM) and structural properties were investigated via Fourier Transform: Infrared (FTIR) spectroscopy. It was found that PS surface is very sensitive to the water vapor. The experimental results suggested that PS surface is a promising candidate material to be used as a humidity sensor.

DOI: 10.12693/APhysPolA.127.1397
PACS numbers: 07.07.Df