High Temperature Annealing of Ion-Plasma Nanostructured Coatings Based on AlN-TiB2(TiSi2) |
| A.D. Pogrebnjaka, G. Abadiasb, O.V. Bondara, O.V. Sobolc, V.M. Beresnevd, A.V. Pshyka, A.A. Demianenkoa, K.O. Belovola, D.A. Kolesnikove and H. Komstaf
aSumy State University, Rymskogo-Korsakova 2, Sumy, 40007, Ukraine bInstitute P', Université de Poitiers-CNRS-ENSMA, SP2MI, Téléport 2, F86962 Chasseneuil-Futuroscope CEDEX, France, France cNational Science Center, Kharkov Institute of Physics and Technology, Akademicheskaya 1, Kharkiv, 61108, Ukraine dKharkiv National University, maj. Nezalezhnosti 4, Kharkiv, 61022, Ukraine eBelgorod State University, Pobedy 85, Belgorod, 308015, Russia fInstitute of Transport, Combustion Engines and Ecology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland |
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| The coatings investigated in this paper were deposited via the magnetron sputtering of AlN-TiB2-Ti-Si2 target in Ar atmosphere. The investigation of structural-phase composition, element composition, morphology and mechanical properties before and after annealing up to 1350°C was carried out. The concentration of elements in the coating was changed after annealing at 900°C and further annealing at 1350°C (especially after annealing at 1350°C). The hardness of as-deposited coatings was 15 GPa, but after annealing at 1350°C the value of hardness increased up to 22÷23.5 GPa. The value of the viscoplastic index was 0.07. All this provide high damping properties of the coating, and amorphous-like structure makes promising the use of these coatings as diffusion barriers in the form: of independent elements, and as a contacting layer in multilayer wear resistant coatings. |
DOI: 10.12693/APhysPolA.125.1284 PACS numbers: 68.60.Dv, 68.37.-d, 62.20.-x |