Experimental Investigation of Low Power Microwave Microplasma Source

D. Czylkowskia, B. Hrycaka, M. Jasińskia and J. Mizeraczyka, b aThe Szewalski Institute of Fluid-Flow Machinery, Polish Academy of Sciences, Centre for Plasma, and Laser Engineering, J. Fiszera 14, 80-231 Gdańsk, Poland bGdynia Maritime University, Department of Marine Electronics, Morska 81-87, 81-225 Gdynia, Poland

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The aim of this paper is to present a novel microwave microplasma source generated in different gases at atmospheric pressure. The design, rule of operation and experimental investigations of the new microwave microplasma source are described. The main advantage of the presented microwave microplasma source is its small size, simplicity, and low cost of construction and operation. The microplasma has a form: of a small plasma jet of dimensions of a few mm, depending on the kind of gas, gas flow rate, and absorbed microwave power. Presented in this paper results of experimental investigations were obtained with an atmospheric pressure argon, krypton, nitrogen, and air microplasma, sustained by microwaves of standard frequency of 2.45 GHz. The absorbed microwave power was up to 70 W. The gas flow rate was from 2 to 25 l/min. The miniature size, simplicity of the source and stability of the microplasma allow to conclude that the presented new microwave microplasma source can find practical applications in various fields.

DOI: 10.12693/APhysPolA.125.1323 PACS numbers: 52.50.Dg, 52.70.Ds, 52.70.Kz, 52.80.Pi