The Kinetics of the Change of SnOx Thin Films Conductivity during the Gas-Adsorptive Interaction
V. Zarapina, V. Luhinb, P. Zukowskic and T.N. Koltunowiczc
aBelarusian State University of Economic, Sverdlova 7, 220050 Minsk, Republic of Belarus
bBelarusian State University of Technology, Sverdlova 13a, 220050 Minsk, Republic of Belarus
cLublin University of Technology, Nadbystrzycka 38a, 20-618 Lublin, Poland
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The subjects of investigation are thin semiconductor SnOx films received by thermal oxidation. The influence of gas environments on electrical conductivity of films were investigated by a static way by measurement of kinetic and equilibrium isotherm of adsorption of trimethylamine, alcohol, hydrogen sulfide and ammonia. The communication between a type isotherm of adsorption, chemical nature of gas and temperature is shown.

DOI: 10.12693/APhysPolA.125.1319
PACS numbers: 68.43.Mn, 73.61.Jc