Effect of Thermal Treatment on the Structure and Mechanical Properties of Coatings Based on (Ti, Hf, Nb, Si)N |
| A.D. Pogrebnjaka, F.F. Komarovb, O.V. Sobolc, A.Sh. Kaverinaa, A.P. Shypylenkoa and C. Karwatd
aSumy State University, Rymskogo-Korsakova 2, Sumy, 40007, Ukraine bBelarus State University, Minsk, Belarus cNational Technical University "KhPi", Kharkov, Ukraine dLublin University of Technology, Lublin, Poland |
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| Current paper presents the results of investigating of nanostructured cathode arc vacuum evaporation coatings, based on (Ti, Hf, Nb, Si)N. Several methods of the structural and elemental analysis were used: proton microbeam, nano- and micro-electron beam, X-ray diffraction analysis. To determine tribological properties (scratch resistance, adhesive and cohesive strength) of the coatings, scratch testing were conducting. Influence of thermal annealing at temperatures 300, 500, 800, 1000°C on elemental composition, microstructure, residual stress, phase composition, profiles of atomic distribution in the coatings were investigated. |
DOI: 10.12693/APhysPolA.125.1312 PACS numbers: 61.46.-w, 62.20.Qp, 62.25.-g |