ACTA

Surface Properties of Me/Si Structures Prepared by Means of Self-Ion Assisted Deposition

I. Tashlykov^a, P. Żukowski^b, O. Mikhalkovich^a and S. Baraishuk^a
^aBelarusian State Pedagogical University, 18, Sovetskaja Str., 220050 Minsk, Belarus
^bLublin University of Technology, Nadbystrzycka 38a, 20-618 Lublin, Poland

Full Text PDF

In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modified by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed.

DOI: 10.12693/APhysPolA.125.1306
PACS numbers: 61.72.uf, 82.80.-d, 62.20.Qp