ACTA

X-Ray Photoelectron Spectroscopy - Methodology and Application

E. Papis-Polakowska^a, R.G. White^b, C. Deeks^b, M. Mannsberger^b, A. Krajewska^c, W. Strupinski^c, T. Płocinski^d and O. Jankowska^e
^aInstitute of Electron Technology, al. Lotników 32/46, 02-668 Warszawa, Poland
^bThermo Fisher Scientific, 81 Wyman St., Waltham (MA) 02454 USA
^cInstitute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warszawa, Poland
^dWarszawa University of Technology, Faculty of Materials Science and Engineering, Wołoska 141, 02-507 Warszawa, Poland
^eCOMEF, Gdańska 2, 40-719 Katowice, Poland

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The crucial measurements aspects of X-ray photoelectron spectroscopy, such as chemical state analysis, depth profiling, mapping, and thickness calculation have been presented. The metal alloys, Ti₂O₅, graphene and type-II InAs/GaSb superlattice structures have been examined by using the new Thermo Scientific K-Alpha X-ray Photoelectron Spectrometer.

DOI: 10.12693/APhysPolA.125.1061
PACS numbers: 79.60.-i, 81.05.ue, 68.47.Gh, 68.35.bg, 68.35.bj