ACTA

Investigations of SAW Structures with Oxide Graphene Layer to Detection of Selected Gases

S. Drewniak^a, T. Pustelny^a, M. Setkiewicz^a, E. Maciak^a, M. Urbańczyk^a, M. Procek^a, Z. Opilski^a, J. Jagiello^b and L. Lipinska^b
^aDepartment of Optoelectronics, Silesian University of Technology, Akademicka 2, 44-100 Gliwice, Poland
^bInstitute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland

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In this paper we present the results of investigations of graphene oxide layers using the SAW structure (structure with surface acoustic wave propagated) exposed to the affect of low concentrations of hydrogen and nitrogen dioxide in synthetic air. During the measurements, the differential signal (from two measuring channels) was recorded. The sensing graphene oxide layer was deposited only on first channel, whereas the second channel was not covered by any additional layer. The tests were made with various concentrations of the analyzed gases and at various temperatures of the sensing structure during the measurements. Analyses were performed with special emphasis on the time response of the sensor structure to changes in the gas atmosphere.

DOI: 10.12693/APhysPolA.124.402
PACS numbers: 42.81.Pa, 82.47.Rs, 07.07.Df