Sputtering of Benzene Sample by Large Ne, Ar and Kr Clusters - Molecular Dynamics Computer Simulations

L. Rzeznika, R. Paruchb, B.J. Garrisonc and Z. Postawab aUniversity of Information Technology and Management, Rzeszów, Poland bInstitute of Physics, Jagiellonian University, Kraków, Poland cDepartment of Chemistry, The Pennsylvania State University, PA 16802, USA

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Molecular dynamics simulations are employed to probe the role of an impact angle on emission efficiency of organic molecules sputtered from benzene crystal bombarded by 15 keV Ne2953, Ar2953, and Kr2953 clusters. It is found that both the cluster type and the angle of incidence have significant effect on the emission efficiency. The shape of the impact angle dependence does not resemble the dependence characteristic for medium size clusters (C60, Ar366), where sputtering yield only moderately increases with the impact angle, has a shallow maximum around 40° and then decreases. On the contrary, for the large projectiles (Ne2953, Ar2953, and Kr2953) the emission efficiency steeply increases with the impact angle, has a pronounced maximum around 55° followed by rapid signal decay. It has been found that the sputtering yield is the most sensitive to the impact angle change for Kr cluster projectiles, while change of the impact angle of Ne projectile has the smallest effect on the efficiency of material ejection.

DOI: 10.12693/APhysPolA.123.825 PACS numbers: 68.49.Sf, 82.80.Ms, 83.10.Rs, 61.82.Pv, 79.20.Rf