Structure Dependent Conductivity of Ultrathin ZnO Films
D. Snigurenkoa, K. Kopalkoa, T.A. Krajewskia, G. Łukaa, S. Gierałtowskaa, B.S. Witkowskia, M. Godlewskia, b, K. Dybkoa, W. Paszkowicza and E. Guziewicza
aInstitute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
bDept. of Mathematics and Natural Sciences College of Science, Cardinal S. Wyszyński University, Dewajtis 5, 01-815 Warsaw, Poland
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Zinc oxide films dedicated for hybrid organic/inorganic devices have been studied. The films were grown at low temperature (100°C, 130°C and 200°C) required for deposition on thermally unstable organic substrates. ZnO layers were obtained in atomic layer deposition processes with very short purging times in order to shift a structure of the films from polycrystalline towards amorphous one. The correlation between atomic layer deposition growth parameters, a structural quality and electrical properties of ZnO films was determined.
DOI: 10.12693/APhysPolA.122.1042
PACS numbers: 73.61.Ga, 78.66.Hf, 81.15.Gh