ACTA

Structure Dependent Conductivity of Ultrathin ZnO Films

D. Snigurenko^a, K. Kopalko^a, T.A. Krajewski^a, G. Łuka^a, S. Gierałtowska^a, B.S. Witkowski^a, M. Godlewski^{a, b}, K. Dybko^a, W. Paszkowicz^a and E. Guziewicz^a
^aInstitute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
^bDept. of Mathematics and Natural Sciences College of Science, Cardinal S. Wyszyński University, Dewajtis 5, 01-815 Warsaw, Poland

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Zinc oxide films dedicated for hybrid organic/inorganic devices have been studied. The films were grown at low temperature (100°C, 130°C and 200°C) required for deposition on thermally unstable organic substrates. ZnO layers were obtained in atomic layer deposition processes with very short purging times in order to shift a structure of the films from polycrystalline towards amorphous one. The correlation between atomic layer deposition growth parameters, a structural quality and electrical properties of ZnO films was determined.

DOI: 10.12693/APhysPolA.122.1042
PACS numbers: 73.61.Ga, 78.66.Hf, 81.15.Gh