ACTA

The Influence of Humidity on the Resistance Structures with Graphene Sensor Layer

T. Pustelny^a, M. Setkiewicz^a, S. Drewniak^a, E. Maciak^a, A. Stolarczyk^b, M. Procek^a, M. Urbańczyk^a, K. Gut^a, Z. Opilski^a, I. Pasternak^c and W. Strupinski^c
^aDepartment of Optoelectronics, Silesian University of Technology, Akademicka 2, 44-100 Gliwice, Poland
^bDepartment of Physical Chemistry and Technology of Polymers, Silesian University of Technology, Strzody 9, 44-100 Gliwice, Poland
^cInstitute of Electronic Materials Technology (ITME), Wólcz'yńska 133, 01-919 Warsaw, Poland

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In the paper the results of investigations are presented concerning the influence of humidity of air on the resistance of a gas sensor structure with a graphene layer. The affects of nitrogen dioxide and humidity action on graphene were studied. We indicated that humidity might play an important role in determining the gas sensing properties of the graphene layer. In the paper it has been shown that in the case of a nitrogen oxide sensor, the reaction of NO₂ with water vapour can generate permanent defects in graphene.

DOI: 10.12693/APhysPolA.122.870
PACS numbers: 07.07.Df, 42.81.Pa, 82.47.Rs