ZnO Nanorods on Nanofibrous ZnO Seed Layers by Hydrothermal Method and Their Annealing Effects
K.G. Yima, S.M. Jeonb, M.S. Kima, S. Kimc, G. Namc, D.-Y. Leed, Jin Soo Kime, Jong Su Kimf and J.-Y. Leema, b
aDepartment of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae 621-749, Republic of Korea
bSMS PE Team 5, MagnaChip Semiconductor Ltd., Gumi 730-723, Republic of Korea
cSchool of Nano Engineering, Inje University, Gimhae 621-749, Republic of Korea
dEpi-manufacturing Technology, Samsung LED Co. Ltd., Suwon 443-373, Republic of Korea
eDivision of Advanced Materials Engineering, Chonbuk National University, Jeonju 561-756, Republic of Korea
fDepartment of Physics, Yeungnam University, Gyeongsan 712-749, Republic of Korea
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ZnO nanorods were grown by using the hydrothermal method on p-type Si (100) substrates with nanofibrous ZnO seed layers. Before the ZnO nanorods growth, nanofibrous ZnO seed layers were spin-coated onto the Si substrates. The structural and optical properties of ZnO nanorods were characterized by scanning electron microscopy, X-ray diffraction, and photoluminescence. The fibrous ZnO nanorods is possible due to the surface morphology of the nanofibrous ZnO seed layers. To investigate annealing effects of the ZnO nanorods, the post-annealing process was carried out at various temperatures ranging from 300 to 700°C under argon conditions. The structural and optical properties of the ZnO nanorods were also affected by the post-annealing treatment.
DOI: 10.12693/APhysPolA.121.214
PACS numbers: 81.05.Dz, 81.15.Lm, 78.55.Et