Ellipsometric and Spectrophotometric Investigations of Porous Silica Thin Films Produced by Sol-Gel Method
E. Skoczeka, J. Jaglarza and P. Karasińskib
aInstitute of Physics, Cracow University of Technology, Podchorążych 1, 30-084 Kraków, Poland
bDepartment of Optoelectronics, Silesian University of Technology, B. Krzywoustego 2, 44-100 Gliwice, Poland
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The work presents the optical properties of porous silica thin films prepared by TEOS sol-gel method. The films were deposited onto glass substrate using dip-coating technique. The spectroscopic ellipsometry measurements have been performed to determine the optical constants of the films. This technique also enabled evaluation of the depolarization for the investigated layers. Additionally, the spectrophotometric measurements of transmittance and reflectance by the use of integrating sphere and reflectance probe have been made with the aim of possible application of the films as antireflective coatings.
DOI: 10.12693/APhysPolA.120.732
PACS numbers: 81.20.Fw, 83.80.Jx, 07.60.Fs, 07.60.Rd