Influence of Substrate Local Heating on Morphology of Al and Al2O3 Nanofilms |
| K. Reszkaa, M. Szczypińskib and M. Pomorskac
aInstitute of Mechatronics, Nanotechnology and Vacuum Technique, Koszalin University of Technology, Śniadeckich 2, 75-435 Koszalin, Poland bTermex Ltd., Lniana 9, 75-213 Koszalin, Poland cInstitute of Metallurgy and Materials Science, PAS, Reymonta 25, 30-059 Kraków, Poland |
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| Experimental investigations presented in this work were focused on the execution of a carousel system with its usability for step-by-step revolutions and the mechanism for clamping the heater, which made it possible to heat substrates individually within the range from 25°C to 300°C. This system was used for depositing the metallic Al films by the magnetron sputtering method on foil made of FeCrAl steel, which found application in the production of metallic catalytic reactors. It was found that in the case of not-heated foil the polycrystalline continuous Al film, which is separated from steel by an amorphous oxide nanofilm obtained spontaneously under influence of weather conditions, was created. The deposition of aluminium on foil heated to the temperature of 300°C caused the film marked by fine grains integrated with small forces to be formed. These differences had an influence on the morphology of the oxide films. |
| DOI: 10.12693/APhysPolA.120.177 PACS numbers: 68.55.jm, 68.55.J- |